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playground:sputter [2009/03/19 15:18]
odonnell Add note about checking second gate if Glassman supplies don't come on.
playground:sputter [2021/03/22 10:17]
carter
Line 3: Line 3:
 ** Cs Sputter Source Startup Procedure ** ** Cs Sputter Source Startup Procedure **
  
-Last modified on 12/06/2006 
-General Considerations 
  
-Cs Sputter Source Cutaway Diagram 
-Cs Sputter Source High Voltage Supplies 
  
-    ​* The proper target ​ must be installed. +** General Considerations **  
-    * The base pressure of 2 x 10E-6 torr or less.+ 
 +  * Review these illustrations:​ 
 +    * [[Cs_labeled|Cs Sputter Source Labeled Cutaway Diagram]]  
 +    * [[cutaway|Cs Sputter Source Cutaway Diagram]] 
 +    * [[hvsupplies|Cs Sputter Source High Voltage Supplies]] 
 +  ​* The proper target ​ must be installed. ​ (See Devon.) 
 +  * The base pressure of 2 × 10<​sup>​-6</​sup> ​torr or less.
   ​   ​
 ** General Preparations ** ** General Preparations **
  
   - Ensure that desired beam target is loaded.   - Ensure that desired beam target is loaded.
-  - Set buncher ​tubes to correct configuration for desired beam species. +  - Set buncher ​tube selector switch ​to correct configuration for desired beam species.  Only rotate the switch clockwise. ​ This switch is a large high voltage rotary switch and the proper position aligns the position number in the center of the arrow marker The position between numbers fells like a detent but is actually the switch wiper falling between the contacts. ​ Do not have the switch in an apparent detent position. ​ Move the switch to the middle of the friction range with the number properly aligned with the arrow marker
-  - Check vacuum on LE extension.�  +  - Check vacuum on LE extension, temperature ​gauge on cryopump should be at minimum value
-  - Temperature ​gauge on cryopump should be well below the green mark+
   - Open source gate valve by pressing either button on gate valve control at source gate.   - Open source gate valve by pressing either button on gate valve control at source gate.
-  - Remove grounding hook from power supply platform and hang on gate before closing.�  +  ​- Set cesium reservoir controller temperature set point (green numbers): ​ 117C for ones of uAs, 120C for tens of uAs. 
-  - Close gate to source area.  Orange lights on Glassman supplies should come on at gate closing. ​ (If not, check other gate on the other side of the accelerator;​ both must be secured.)  +  ​- Remove grounding hook from power supply platform and hang on gate before closing.  
-  - Use long plexi rod to turn on top 2 Glassmans (target ​and extractor) by pushing green buttons. +  - Close both gates to source area.  Orange lights on Glassman supplies should come on at gate closing. ​ (If not, check other gate on the other side of the accelerator;​ both must be secured.)  
 +  - Press the doorbell button ​on top the Pelletron AC Power Center. ​ The Extractor ​and Target Glassman supplies should indicate Voltage Control with red lights.
 ** Startup and Normal Operation (in control room) ** ** Startup and Normal Operation (in control room) **
  
-  - Turn on and set the Del main extractor supply to the desired voltage for the particular buncher setting. +  - Turn on and set the **Del main extractor** supply to the desired voltage for the particular buncher setting. 
-  - Set the Glassman extractor power supply to 12.5 KV. Check to be sure the current is less than about 5 milliamps and the "​control ​milliampres" light is NOT lit. High current indicates that the source needs serviced. +  - Turn up the **ionizer** heater. ​  The ionizer operates at 21-22 amps.  Keep in mind that the current will fall slightly as the ionizer gets warmer. ​ Keep adjusting the current until the ionizer is stable at 21-22 A. It should take about 1 minute to reach 21 A from the standby value of 10 A. 
-  - Set the Glassman target power supply to 6.5 kV. Check to be sure the current is less than about 5 milliamps and the "​control ​milliampres" light is NOT lit. High current indicates that the source needs serviced. +  - Turn up the Cesium **feed tube** heater to 0.450 amperes. ​  
-  - Slowly turn up the ionizer heater((This source has a HELICAL ionizer.)) in small steps. ​  The ionizer operates at 21 amperes. It should take about ten (10) minutes to reach 21 from the standby value of 10 A. Keep in mind that the amperage ​will fall slightly as the ionizer gets warmer. ​ Keep adjusting the current until the ionizer is stable ​at 21 A. +  - Set the cesium **reservoir** heater current to **0.315** Amps. This is an approximate value above the needed power level.  ​ 
-  - Turn up the Cs feed tube heater to 0.450 amperes.  ​ +  - Set the Glassman ​**extractor** power supply to 12.5 KV. Check to be sure the current is less than about 5 milliamps and the "​control ​milliamperes" light is NOT lit. High current indicates that the source needs to be serviced. 
-  - Set the cesium reservoir heater ​to 0.380.� This should be enough to give ones of microamps beam for p and d.    A setting of about 0.420 should produce tens of microamps.� Cs vaporization starts at a temperature of ~80° Celsius. ​  The maximum reservoir temperature should not exceed 100° Celsius.� The reservoir current should not exceed 0.500 +  - Set the Glassman ​**target** power supply to 6.5 kV. Check to be sure the current is less than about 5 milliamps and the "​control ​milliamperes" light is NOT lit. High current indicates that the source needs to be serviced. ​ A newly installed pellet may cause instability for the first hour or so, but will become ​stable. 
-  - Tune the beam with the inflection magnet, source lens (usually about 1.5 kV), lens A, and 2Y steerer. +  - Set the Glassman **lens** power supply ​to 1.5 kV
-  - Monitor the target and extractor currents: target current should be around 2.5 milliamps, and no more than 5 mA.+  - **Tune the beam with the inflection magnet, source lens (usually about 1.5 kV), einzel ​lens A, and 2Y steerer.**  The 2X steerer should be neutral (5.00 on dial) as X steering is be done by the inflection magnet at this stage
 +  - Monitor the target and extractor currents: target current should be around 2.5 milliamps, and no more than 5 mA.  If target current gets too high, reduce the cesium reservoir setting.
  
 ** Out-gassing the source after cleaning ** ** Out-gassing the source after cleaning **
Line 38: Line 40:
   - The source gate valve should be closed for this operation.   - The source gate valve should be closed for this operation.
   - Wait for normal vacuum. ​ Normal is when the needle is in the blue mark on the gauge above the TV in the control room.   - Wait for normal vacuum. ​ Normal is when the needle is in the blue mark on the gauge above the TV in the control room.
-  - Set ionizer to 10A.� This will lead to a rise in the vacuum pressure.+  - Set ionizer to 10A. This will lead to a rise in the vacuum pressure.
   - Wait for vacuum to fall back to the blue mark on the gauge   - Wait for vacuum to fall back to the blue mark on the gauge
-  - Raise the ionizer by an additional� 2-3 A and wait for the vacuum to fall back into the blue range. +  - Raise the ionizer by an additional 2-3 A and wait for the vacuum to fall back into the blue range. 
-  - Repeat this process until the ionizer is at 21 A and the vacuum is in the blue range.+  - Repeat this process until the ionizer is at 21 A and the vacuum is in the blue range, may take 8 hours.
   - Open the source gate valve and carry out the Startup and Normal Operation.   - Open the source gate valve and carry out the Startup and Normal Operation.
  
 ** Checklist for Target Pellet Change ** ** Checklist for Target Pellet Change **
  
-  * FIXME To be provided...+  * [[sputter:​pellet|Sputter Source Target Pellet Change]]
  
 ** Shut Down Procedure ** ** Shut Down Procedure **
  
-  - Turn down the reservoir ​heater ​power supply.  ​Off is about 0.070 A+  - **Cesium ​reservoir**: The reservoir has a temperature controller that turns the power on/off as needed for a constant temperature.  ​The controller ​is located next to the analog temperature meter on the source power platform. ​ The red numbers are the measured temperature,​ the green numbers are the set point temperature,​ there is a small red light that indicates when the controller is calling for power. ​ The reservoir current switches between ​0.150A and .315A as directed by the controller. 
-  - Wait for the reservoir temperature to drop below 80° C.  ​+  - Wait until the reservoir controller'​s red power light is on and you can see about .315A reservoir current on the meter, run the reservoir current down on the digital meter. ​ Make sure that you see controller red light on with minimal amps of current
 +  - Wait for the reservoir temperature ​(red numbers on controller) ​to drop below** 85**° ​C.  ​
   - Turn down the feed tube power supply.   - Turn down the feed tube power supply.
   - Wait for the feed tube temperature to drop below 80° C.   - Wait for the feed tube temperature to drop below 80° C.
Line 59: Line 62:
   - Turn off DEL high voltage supply.   - Turn off DEL high voltage supply.
   - Close sputter source vacuum gate valve.   - Close sputter source vacuum gate valve.
- 
-** Original Credits ** 
-\\  
-Maintained by:\\ 
-Thomas N. Massey\\ 
-Office: Accelerator Lab 217\\ 
-Telephone: (740)593-0933\\ 
-E-Mail: massey@ohio.edu\\ 
-Last modified on 12/​06/​2006\\ 
  
  
playground/sputter.txt · Last modified: 2021/03/22 11:04 by carter