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** Cs Sputter Source Startup Procedure ** | ** Cs Sputter Source Startup Procedure ** | ||
- | Last modified on 12/06/2006 | ||
- | General Considerations | ||
- | Cs Sputter Source Cutaway Diagram | ||
- | Cs Sputter Source High Voltage Supplies | ||
- | * The proper target must be installed. | + | ** General Considerations ** |
- | * The base pressure of 2 x 10E-6 torr or less. | + | |
- | General Preparations | + | * Review these illustrations: |
- | + | * [[Cs_labeled|Cs Sputter Source Labeled Cutaway Diagram]] | |
- | 1. Ensure that desired beam target is loaded. | + | * [[cutaway|Cs Sputter Source Cutaway Diagram]] |
- | 2. Set buncher tubes to correct configuration for desired beam species. | + | * [[hvsupplies|Cs Sputter Source High Voltage Supplies]] |
- | 3. Check vacuum on LE extension.� | + | * The proper target must be installed. (See Devon.) |
- | 4. Temperature gauge on cryopump should be well below the green mark. | + | * The base pressure of 2 × 10<sup>-6</sup> torr or less. |
- | 5. Open source gate valve by pressing either button on gate valve control at source gate. | + | |
- | 6. Remove grounding hook from power supply platform and hang on gate before closing.� | + | ** General Preparations ** |
- | 7. Close gate to source area. Orange lights on Glassman supplies should come on at gate closing. | + | |
- | 8. Use long plexi rod to turn on top 2 Glassmans (target and extractor) by pushing green buttons. | + | |
+ | - Ensure that desired beam target is loaded. | ||
+ | - Set buncher tubes to correct configuration for desired beam species. | ||
+ | - Check vacuum on LE extension, temperature gauge on cryopump should be at minimum value. | ||
+ | - Open source gate valve by pressing either button on gate valve control at source gate. | ||
+ | - Remove grounding hook from power supply platform and hang on gate before closing. | ||
+ | - Close both gates to source area. Orange lights on Glassman supplies should come on at gate closing. (If not, check other gate on the other side of the accelerator; both must be secured.) | ||
+ | - Press the doorbell button on top the Pelletron AC Power Center. The Extractor and Target Glassman supplies should indicate Voltage Control with red lights. | ||
** Startup and Normal Operation (in control room) ** | ** Startup and Normal Operation (in control room) ** | ||
- | 1. Turn on and set the Del main extractor supply to the desired voltage for the particular buncher setting. | + | - Turn on and set the **Del main extractor** supply to the desired voltage for the particular buncher setting. |
- | 2. Set the Glassman extractor power supply to 12.5 KV. Check to be sure the current is less than about 5 milliamps and the "control milliampres" light is NOT lit. High current indicates that the source needs serviced. | + | - Turn up the **ionizer** heater. The ionizer operates at 21-22 amps. Keep in mind that the current will fall slightly as the ionizer gets warmer. Keep adjusting the current until the ionizer is stable at 21-22 A. It should take about 1 minute to reach 21 A from the standby value of 10 A. |
- | 3. Set the Glassman target power supply to 6.5 kV. Check to be sure the current is less than about 5 milliamps and the "control milliampres" light is NOT lit. High current indicates that the source needs serviced. | + | - Turn up the Cesium **feed tube** heater to 0.450 amperes. |
- | 4. Slowly turn up the ionizer heater in small steps. ( This source has a HELICAL Ionizer). The helical ionizer operates at 21 amperes. It should take about ten (10) minutes to reach 21 A from the standby value of 10 A. Keep in mind that the amperage will fall slightly as the ionizer gets warmer.� Keep adjusting until the ionizer is stable at 21 A. | + | - Set the cesium **reservoir** heater to 0.260. This should be enough to give ones of microamps beam for p and d. A setting of about 0.270 - 0.275 should produce tens of microamps. The reservoir current should not exceed 0.280. |
- | 5. Turn up the Cs feed tube heater to 0.450 amperes. | + | - Set the Glassman **extractor** power supply to 12.5 KV. Check to be sure the current is less than about 5 milliamps and the "control milliamperes" light is NOT lit. High current indicates that the source needs to be serviced. |
- | 6. Set the cesium reservoir heater to 0.380.� This should be enough to give ones of microamps beam for p and d. A setting of about 0.420 should produce tens of microamps.� Cs vaporization starts at a temperature of ~80 degree Celsius. The maximum reservoir temperature should not exceed 100 degrees Celsius.� The reservoir current should not exceed 0.500 | + | - Set the Glassman **target** power supply to 6.5 kV. Check to be sure the current is less than about 5 milliamps and the "control milliamperes" light is NOT lit. High current indicates that the source needs to be serviced. A newly installed pellet may cause instability for the first hour or so, but will become stable. |
- | 7. Tune the beam with the inflection magnet, source lens (about 1KV), lens A, and 2Y steerer. | + | - Set the Glassman **lens** power supply to 1.5 kV. |
- | 8. Monitor the target and extractor currents.� Target current should operate at around 2.5 milliamps, no more than 5 mA. | + | - **Tune the beam with the inflection magnet, source lens (usually about 1.5 kV), einzel lens A, and 2Y steerer.** The 2X steerer should be neutral (5.00 on dial) as X steering is be done by the inflection magnet at this stage. |
+ | - Monitor the target and extractor currents: target current should be around 2.5 milliamps, and no more than 5 mA. If target current gets too high, reduce the cesium reservoir setting. | ||
** Out-gassing the source after cleaning ** | ** Out-gassing the source after cleaning ** | ||
- | 1. The source gate valve should be closed for this operation. | + | - The source gate valve should be closed for this operation. |
- | 2. Wait for normal vacuum. Normal is when the needle is in the blue mark on the gauge above the TV in the control room. | + | - Wait for normal vacuum. Normal is when the needle is in the blue mark on the gauge above the TV in the control room. |
- | 3. Set ionizer to 10A.� This will lead to a rise in the vacuum pressure. | + | - Set ionizer to 10A. This will lead to a rise in the vacuum pressure. |
- | 4. Wait for vacuum to fall back to the blue mark on the gauge | + | - Wait for vacuum to fall back to the blue mark on the gauge |
- | 5. Raise the ionizer by an additional� 2-3 A and wait for the vacuum to fall back into the blue range. | + | - Raise the ionizer by an additional 2-3 A and wait for the vacuum to fall back into the blue range. |
- | 6. Repeat this process until the ionizer is at 21 A and the vacuum is in the blue range. | + | - Repeat this process until the ionizer is at 21 A and the vacuum is in the blue range, may take 8 hours. |
- | 7. Open the source gate valve and carry out the Startup and Normal Operation. | + | - Open the source gate valve and carry out the Startup and Normal Operation. |
** Checklist for Target Pellet Change ** | ** Checklist for Target Pellet Change ** | ||
- | + | ||
+ | * [[sputter:pellet|Sputter Source Target Pellet Change]] | ||
** Shut Down Procedure ** | ** Shut Down Procedure ** | ||
- | 1. Turn down the reservoir heater power supply. Off is about 0.070 A. | + | - Turn down the cesium reservoir heater power supply. Off is about 0.070 A. |
- | 2. Wait for the reservoir temperature to drop below 80 degrees. | + | - Wait for the reservoir temperature to drop below 80° C. |
- | 3. Turn down the feed tube power supply. | + | - Turn down the feed tube power supply. |
- | 4. Wait for the feed tube temperature to drop below 80 degrees. | + | - Wait for the feed tube temperature to drop below 80° C. |
- | 5. Wait for the Target Supply current to fall to less than 1 milliamp. | + | - Wait for the Target Supply current to fall to less than 1 milliamp. |
- | 6. Turn the ionizer current down to 10 amps. (The ionizer current should be left at 10 amps. This helps avoid the "poisoning" of the ionizer.) | + | - Turn the ionizer current down to 10 amps. (The ionizer current should be left at 10 amps. This helps avoid the "poisoning" of the ionizer.) |
- | 7. Turn down target and extractor voltages to zero. | + | - Turn down target and extractor voltages to zero. |
- | 8. Turn off DEL high voltage supply. | + | - Turn off DEL high voltage supply. |
- | 9. Close sputter source vacuum gate valve. | + | - Close sputter source vacuum gate valve. |
- | + | ||
- | ** Original Credits ** | + | |
- | + | ||
- | Maintained by: | + | |
- | Thomas N. Massey | + | |
- | Office: Accelerator Lab 217 | + | |
- | Telephone: (740)593-0933 | + | |
- | E-Mail: MASSEY@OHIOU.EDU | + | |
- | Last modified on 12/06/2006 | + | |