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playground:sputter [2009/03/19 15:18] odonnell Add note about checking second gate if Glassman supplies don't come on. |
playground:sputter [2009/04/15 15:56] 132.235.40.97 |
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** Cs Sputter Source Startup Procedure ** | ** Cs Sputter Source Startup Procedure ** | ||
- | Last modified on 12/06/2006 | + | Last modified on 2009 March 19, 15:20\\ |
- | General Considerations | + | |
- | Cs Sputter Source Cutaway Diagram | + | ** General Considerations ** |
- | Cs Sputter Source High Voltage Supplies | + | |
- | * The proper target must be installed. | + | * Review these illustrations: |
- | * The base pressure of 2 x 10E-6 torr or less. | + | * [[cutaway|Cs Sputter Source Cutaway Diagram]] |
+ | * [[hvsupplies|Cs Sputter Source High Voltage Supplies]] | ||
+ | * The proper target must be installed. (See Devon.) | ||
+ | * The base pressure of 2 × 10<sup>-6</sup> torr or less. | ||
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** General Preparations ** | ** General Preparations ** | ||
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** Checklist for Target Pellet Change ** | ** Checklist for Target Pellet Change ** | ||
- | * FIXME To be provided... | + | * [[sputter:pellet|Sputter Source Target Pellet Change]] |
** Shut Down Procedure ** | ** Shut Down Procedure ** |