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playground:sputter [2009/03/19 15:15] odonnell Format changed to use doku wiki numbered lists (which have line wrap) instead of original numbered lines (which don't). |
playground:sputter [2009/03/19 15:24] odonnell |
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** Cs Sputter Source Startup Procedure ** | ** Cs Sputter Source Startup Procedure ** | ||
- | Last modified on 12/06/2006 | + | Last modified on 2009 March 19, 15:20\\ |
- | General Considerations | + | |
- | Cs Sputter Source Cutaway Diagram | + | ** General Considerations ** |
- | Cs Sputter Source High Voltage Supplies | + | |
- | * The proper target must be installed. | + | * Review these illustrations: |
- | * The base pressure of 2 x 10E-6 torr or less. | + | * [[cutaway|Cs Sputter Source Cutaway Diagram]] |
+ | * [[hvsupplies|Cs Sputter Source High Voltage Supplies]] | ||
+ | * The proper target must be installed. (See Devon.) | ||
+ | * The base pressure of 2 × 10<sup>-6</sup> torr or less. | ||
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** General Preparations ** | ** General Preparations ** | ||
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- Open source gate valve by pressing either button on gate valve control at source gate. | - Open source gate valve by pressing either button on gate valve control at source gate. | ||
- Remove grounding hook from power supply platform and hang on gate before closing.� | - Remove grounding hook from power supply platform and hang on gate before closing.� | ||
- | - Close gate to source area. Orange lights on Glassman supplies should come on at gate closing. | + | - Close gate to source area. Orange lights on Glassman supplies should come on at gate closing. (If not, check other gate on the other side of the accelerator; both must be secured.) |
- Use long plexi rod to turn on top 2 Glassmans (target and extractor) by pushing green buttons. | - Use long plexi rod to turn on top 2 Glassmans (target and extractor) by pushing green buttons. | ||