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playground:power
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playground:power [2010/08/02 13:20] 132.235.40.102 |
playground:power [2011/06/09 18:52] 132.235.40.233 Add source cooling water check to sputter source vacuum step (JEO) |
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| - | 3) Return to the sputter source vacuum cabinet. Activate the systems by pushing the buttons indicated by the green arrows, from left to right, Fore Pump, Freon Compressor, Diffusion Pump, and, if those buttons have all turned green, the Baffle (gate) Valve. | + | 3) Return to the sputter source vacuum cabinet. Activate the systems by pushing the buttons indicated by the green arrows, from left to right, Fore Pump, Freon Compressor, Diffusion Pump, and, if those buttons have all turned green, the Baffle (gate) Valve. If the diffusion pump will not come on, check that the source cooling water is turned on. |
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playground/power.txt ยท Last modified: 2020/07/12 13:43 by carter
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